DESAIN, FABRIKASI, DAN KARAKTERISASI SENSOR KELEMBABAN DAN SUHU BERBASIS TEKNOLOGI FILM TEBAL

Abstract

Fabrikasi sensor kelembaban dan suhu pada satu substrat untuk mendukung sistem pemantauan lingkungan terkoordinasi yang presisi dan efisien. Penelitian ini mendesain, memfabrikasi, dan mengkarakterisasi sensor kelembaban resistif dan suhu berbasis teknologi film tebal menggunakan metode screen printing dan doctor blade. Material yang digunakan meliputi pasta perak, PVA serta komposit PVA-TiO2 dengan variasi 5%, 10%, dan 15%. Karakterisasi material menunjukkan PVA memiliki ukuran partikel 23,52 nm, ketebalan lapisan sensitif 11,44 µm, ketebalan elektroda 20,00 µm, dan bersifat semi-kristalin, sedangkan TiO2 berstruktur anatase. Komposit PVA-TiO2 memiliki distribusi partikel 300-400 nm, disertai peningkatan ketebalan lapisan sensitif, serta variasi ketebalan elektroda. FTIR menginformasi TiO2 terintegrasi di dalam PVA melalui interaksi hidrogen. Kinerja sensor kelembaban menunjukkan penurunan resistansi pada 60-90% RH. Sensor suhu mengalami peningkatan resistansi seiring kenaikan suhu 30-80°C.

The fabrication of humidity and temperature sensors on a single substrate was carried out to support a coordinated environmental monitoring systems that is precise and efficient. This study design, fabricate, and characterize resistive humidity and temperature sensors based on thick film technology using screen printing and doctor blade methodes. The materials used include silver paste, PVA, and PVA-TiO2 composites with variations 5%, 10%, and 15%. Material characterization showed that PVA had a particle size of 23,52 nm, a sensitive layer thickness of 11,44 µm, an electrode thickness of 20,00 µm and a semi-crystalline nature, whereas TiO2 exhibited and anatase structure. The PVA-TiO2 composite had a particle distribution of 300-400 nm, accompanied by an increase in sensitive layer thickness and variations in electrode thickness. FTIR indicated that TiO2 was integrated into PVA through hydrogen interaction. The humidity sensor showed a decrease in resistance at 60-90% RH. The temperature sensor exhibited an increase in resistance with increasing temperature 30-80°C.