Development of a novel ozone gas sensor bas~d on sol-gel fabricated photonic crystal

Abstract

We luve developed• novel ozone gu sensor ~sed on one dimensio~I photonic crysUI with two defects. In this pl•tform. lhe g•S is dissolved in a specific ~utr.il buffer k.ilium iodide re.igent to include the Bttr Lambert effect. Thecorresponding photoniccryst.il which w•s fabriuted by usina sol-gel method consists of• high rdr•ctive index l•yer of TiOJ •nd •low refractive index layer or SiOJ. Prior to the fabric•tion or corresponding photonic crystal, we grew the Ti02 and Si<>J single layer sepM.itdy in order to ensure that the performance of each l•yer fultilled the required characteristics providtd by our simul.ition. After that. the fabrication processed was conducted layer-by-layer •nd inspected by spectrophotometer. The perfonn.mce test or t.he r.ibricated photonic crysul. includina its validation. accuncy and sensitivity. wu then conducttd through spectroscopic treat~nt and we used ozoniur u the gas source. V•lidation test wa.s perfonned by comparing the results with measurement using NBKI method .ind showed a good agreemenr. It was found that the accuracy value is up to 98.75%. Based on <11 st•tistical approach. we found that the limit or detection is 1.067 μ.gjml .imbient air.