Struktur Kristal Film BaxSr1-xTiO3 dengan Variasi Fraksi Mol (x = 0,5 ; 0,6 ; 0,7 ; 0,8)

Abstract

BaxSr1-xTiO (BST) film has been successfully made by growing BST on substrate surface Si (100) p-type with chemical solution deposition methode and spin coating technique at 3000 rpmrotational speed for 30 seconds. BST film made with mole fraction variation (x = 0,5 ; 0,6 ; 0,7 ; 0,8) and annealing process at a temperature of 850 °C for 22 hours. Characterization of BST samples obtained using X-ray diffractometer. The results of X-ray diffractometer characterization showed that the best crystal structure resulting in x = 0,5 mole fraction with the highest diffraction intensity and 25,55 nm crystal size, while the lowest diffraction intensity is owned by BST films with x = 0,8 mole fraction and the crystal size of 41,86 nm.