Sensor Field Effect TransistorBerbasisNanoseratPolianilin untukMengukur Konsentrasi Gas Amonia

Abstract

Gas sensors can be made of metal, metal oxide, organic conductive polymers. Gas sensors of organic conductive polymers have superiority such as showing good sensitivity to the vapors of organic compounds and can be used at room temperature. Polyaniline nanofiber as active layers of Field Effect Transistor (FET) sensor sensitive in responding to ammonia gas (NH3). This research consists of manufacturing and characterization of FET sensor and determine the sensitivity of the FET sensor. FET sensor is made by oxidizing silicon wafers (the type-p Si) as layer dielectric (SiO2) and coating polyaniline nanofiber on SiO2 layers. On the type-p Si layer isset with gate electrode while polyaniline nanofiber layer is set with drain and source. When the FET sensor is given with more negative gate voltage so that drain-source current increases. Sensitivity value of FET sensor at Vg = 0 V is obtained 3.4215 V/% and Vg = -5 V is obtained 3.9018 V/%. The sensitivity test results showsmore and more negative gate voltage is given to be the greater the greater sensitivity value.