Pembuatan Film Tipis BaxSr1-xTiO3 dengan Variasi Fraksi Mol (x = 0; 0,125; 0,250; 0,375) Menggunakan Metode Chemical Solution Deposition

Abstract

Pembuatan film tipis BaxSr1-xTiO3 dengan variasi fraksi mol ( x = 0; 0,125; 0,250; 0,375) menggunakan metode Chemical Solution Deposition dengan teknik spin coating telah berhasil dibuat di atas substrat Si (100) tipe-p dan diputar pada kecepatan 8000 rpm selama 60 detik. Proses annealing dimulai pada suhu ruang dengan kelajuan 1,67°C/menit hingga mencapai suhu 850 °C dan ditahan selama 8 jam, dilanjutkan dengan proses pendinginan selama 12 jam hingga mencapai suhu ruang. Ketebalan film dihitung menggunakan metode volumetrik dan dihasilkan nilai ketebalan 2,0983 μm; 2,7977 μm; 3,4971 μm dan 3,6545 μm. Hasil perhitungan menggunakan persamaan Cramer-Cohen diperoleh nilai parameter kisi a = b = c, yaitu 3,975 Å; 3,981 Å; 4,073 Å dan 4,094 Å dengan struktur kristal kubus. Hasil analisis menggunakan MAUD diperoleh visualisasi struktur kristal kubus dengan parameter kisi 3,919 Å; 3,932 Å; 3,951 Å dan 3,956 Å. Nilai energi bandgap yang dianalisis menggunakan metode Kubelka-Munk, yaitu 3,48 eV; 3,37 eV; 3,09 eV dan 3,05 eV.

Fabrication of BaxSr1-xTiO3 thin films with various mol fractions (x = 0; 0,125; 0,250; 0,375) using the chemical solution deposition method with a spin coating technique has been successfully made on a p-type Si (100) substrate and rotated at a speed of 8000 rpm for 60 seconds. The annealing process begins at room temperature at a speed of 1,67°C/min until it reaches a temperature of 850°C and is held for 8 hours, followed by cooling process for 12 hours until it reaches room temperature. Film thickness was calculated using volumetric method and the results are 2,0983 μm; 2,7977 μm; 3,4971 μm and 3,6545 μm. The results of the calculation using Cramer-Cohen equation obtained that the lattice parameters a = b = c are 3,975 Å; 3,981 Å; 4,073 Å and 4,094 Å with cubic crystal structure. The results of the analysis using MAUD obtained a visualization of the crystal structure is cubic with lattice parameters are 3,919 Å; 3,932 Å; 3,951 Å and 3,956 Å. The values of bandgap energy that was analyzed using Kubelka-Munk method equation are 3,48 eV; 3,37 eV; 3,09 eV and 3,05 eV.