Pembuatan Film Tipis BaxSr1-xTiO3 dengan Variasi Fraksi Mol (x = 0; 0,125; 0,250; 0,375) Menggunakan Metode Chemical Solution Deposition
Abstract
Pembuatan film tipis BaxSr1-xTiO3 dengan variasi fraksi mol ( x = 0; 0,125;
0,250; 0,375) menggunakan metode Chemical Solution Deposition dengan teknik
spin coating telah berhasil dibuat di atas substrat Si (100) tipe-p dan diputar pada
kecepatan 8000 rpm selama 60 detik. Proses annealing dimulai pada suhu ruang
dengan kelajuan 1,67°C/menit hingga mencapai suhu 850 °C dan ditahan selama
8 jam, dilanjutkan dengan proses pendinginan selama 12 jam hingga mencapai
suhu ruang. Ketebalan film dihitung menggunakan metode volumetrik dan
dihasilkan nilai ketebalan 2,0983 μm; 2,7977 μm; 3,4971 μm dan 3,6545 μm.
Hasil perhitungan menggunakan persamaan Cramer-Cohen diperoleh nilai
parameter kisi a = b = c, yaitu 3,975 Å; 3,981 Å; 4,073 Å dan 4,094 Å dengan
struktur kristal kubus. Hasil analisis menggunakan MAUD diperoleh visualisasi
struktur kristal kubus dengan parameter kisi 3,919 Å; 3,932 Å; 3,951 Å dan
3,956 Å. Nilai energi bandgap yang dianalisis menggunakan metode
Kubelka-Munk, yaitu 3,48 eV; 3,37 eV; 3,09 eV dan 3,05 eV. Fabrication of BaxSr1-xTiO3 thin films with various mol fractions (x = 0;
0,125; 0,250; 0,375) using the chemical solution deposition method with a spin
coating technique has been successfully made on a p-type Si (100) substrate and
rotated at a speed of 8000 rpm for 60 seconds. The annealing process begins at
room temperature at a speed of 1,67°C/min until it reaches a temperature of 850°C
and is held for 8 hours, followed by cooling process for 12 hours until it reaches
room temperature. Film thickness was calculated using volumetric method and the
results are 2,0983 μm; 2,7977 μm; 3,4971 μm and 3,6545 μm. The results of the
calculation using Cramer-Cohen equation obtained that the lattice parameters
a = b = c are 3,975 Å; 3,981 Å; 4,073 Å and 4,094 Å with cubic crystal structure.
The results of the analysis using MAUD obtained a visualization of the crystal
structure is cubic with lattice parameters are 3,919 Å; 3,932 Å; 3,951 Å and
3,956 Å. The values of bandgap energy that was analyzed using Kubelka-Munk
method equation are 3,48 eV; 3,37 eV; 3,09 eV and 3,05 eV.
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