Sintesis dan Karakterisasi Film Tipis Stronsium Titanat (SrTiO3) didadah Lantanum Oksida (La2O3)

Abstract

Film SrTiO3 dengan variasi konsentrasi pendadah La2O3 (0%, 2%, 4%, 6%) telah berhasil dibuat di atas substrat silikon (100) tipe-p menggunakan metode Chemical Solution Deposition (CSD) dengan bantuan teknik spin coating dengan kecepatan putar 8000 rpm. Film SrTiO3 di-annealing dengan kelajuan suhu sebesar 1,67oC/menit dan pada suhu 850oC ditahan selama 8 jam, lalu mengikuti proses pendinginan hingga suhu kamar selama 13 jam. Film SrTiO3 yang didadah La2O3 (0%, 2%, 4%, 6%) dikarakterisasi menggunakan spektrofotometer UV-Vis dan XRD sehingga menghasilkan nilai energi bandgap secara berturut-turut sebesar 3,85 eV; 3,21 eV; 3,16 eV dan 3,05 eV. Hasil parameter kisi a yang didapatkan pada karakterisasi XRD sebesar 4,148 Å; 4,074 Å; 4,037 Å dan 3,975 Å dengan struktur kristal berbentuk kubus (a = b = c). Hasil analisis menggunakan perangkat lunak MAUD sebagai data pembanding didapatkan parameter kisi a sebesar 3,928 Å; 3,926 Å; 3,913 Å dan 3,914 Å. Analisis hasil menggunakan perangkat lunak MAUD diperoleh visualisasi struktur kristal kubus pada film SrTiO3.

SrTiO3 film with the variation of La2O3 doping concentration (0%, 2%, 4%, 6%) has been successfully made on silicon substrate (100) p-type using the Chemical Solution Deposition (CSD) method with the spin coating technique with a rotational speed 8000 rpm. SrTiO3 film was annealed with an increase in temperature of 1.67oC/minute and at 850oC for 8 hours, then follow the cooling process to room temperature for 13 hours. SrTiO3 film with La2O3 doped (0%, 2%, 4%, 6%) was characterization using a spectrophotometer UV-Vis and XRD, so that the bandgap energy value was 3,85 eV; 3,21 eV; 3,16 eV and 3,05 eV. The result of the lattice parameters obtained based on XRD characterization are 4,148 Å; 4,074 Å; 4,037 Å and 3,975 Å with a cubic crystal structure (a = b = c). The results of the analysis using MAUD software as comparison data obtained lattice parameters a of 3.928 Å; 3,926 Å; 3,913 Å and 3,914 Å. Analysis of the results using MAUD software obtained visualization of the cube crystal structure on the SrTiO3 film.